Woollam Ellipsometry Software

 

Single Layers:

• With and without absorption

 

Mixed Materials based on Effective Medium Theory (EMA)

• Bruggeman or Maxwell-Garnet
• 2 or 3 materials
• Anisotropic EMA

 

Parameterized Dispersion Functions:

• Cauchy, Urbach, Lorentz, Gaussian, Harmonic, Tauc-Lorentz, TOLO phonon absorption, etc.
• B-Spline
• User-defined dispersion function
• parameterized semi-conductor model

 

Graded layer:

• composition profile vs. film depth:
• inear, triangular, sinusoidal
• or any arbitrary user-defined profile
• simple graded
• EMA based graded (mixed material graded)
• Function based graded

 

Alloy materials

• AlxGa1-xAs, HgxCd1-xTe, SixGe1-x, SiOxNy, etc.
• Temperature dependent materials

 

 

Superlattice structures

• Repeated combinations of large numbers of any of the above layers

 

Anisotropic films and bulk materials with optical axis oriented:

• Uniaxial, biaxial
• any arbitrary orientation
• determination of Euler angles
• absorbing and non-absorbing

 

Modelling of non-ideal cases:

• Backside reflection of substrate
• Thickness non-uniformity
• Window effects for in-situ applications

 

 

Data types:

 

All data types can be fitted simultaneously

 

Angle Dependent Spectroscopic Ellipsometry Data

• Psi & Delta as function of angle of incidence, wavelength and time

 

Transmission and Reflection Data

• P-, s-, or user-polarized as function of angle and wavelength

 

Transmission Ellipsometry

• Like ellipsometry data, but in transmission

 

Generalized Ellipsometry (Anisotropy)

• Determination of off-diagonal elements of the Jones matrix in reflection and transmission

 

Data with Backside Reflection

• Measurements from top and bottom (through substrate)

 

 

 

PDF Downloads

 

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