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Spectroscopic Ellipsometer VASE®

 

(Variable Angle of incidence Spectroscopic Ellipsometer)

 

  • vertical sample mount (V-VASE)
  • computer-controlled angle of incidence goniometer 20° - 90°
  • single or double chamber monochromator
  • spectral range 240 - 1100 nm (standard)
  • NIR to 1700 nm

  • New feature: extended NIR to 3200 nm

  • DUV from 193 nm
  • AutoRetarder (V-VASE)
  • computer-controlled 150 mm mapping
  • manual 50 mm XY translation
  • 200 µm focused beam option
  • camera
  • cryostat (4.2 to 470K)
  • heat cell (up to 300°C)


 

 

Downloads

 

VASE Video

VASE



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LOT-QuantumDesign GmbH | info@lot-qd.de | Im Tiefen See 58 | D-64293 Darmstadt | Tel.: +49 6151 88060 | Fax: +49 6151 8806920 | HRB Amtsgericht Darmstadt 6538