Automated Confocal Raman and Atomic Force Microscope alpha700

High-end Automated Surface Inspection Tool for Extremely Large Samples

For the automatic and comprehensive inspection of extremely large samples with Raman and AFM, the alpha700 is the instrument of choice. The full range of the motorized microscopy stage is 350 x 300 mm in the x and y directions and the sample holder can be individually configured to match specific requirements providing extensive and flexible sample handling.

For analyzing the chemical properties of a sample, Confocal Raman Imaging, multi-point spectra acquisition or large area mapping can be applied. Through combination with the high resolution surface topography characterizations provided by Atomic Force Microscopy, the chemical information can be linked to structural properties. For example, investigating defects on a 300 mm wafer can be easily executed for the most comprehensive sample analysis.

The system includes a wide variety of hardware and software features for the automated execution of reliable surface characterization on the nano- and submicrometer scale. All the modes and predefined measurement sequences can be run automatically without any ongoing process control by an operator.

The alpha700 can easily handle very large samples for automated analysis.	A rock-solid but flexible design achieves the precision and accuracy necessary for automated AFM and Raman Imaging.